001: 329
003: Starlibrary PMS 4.5
005: 20180420
020: ^a0268-1242
066: ^aAm.S
100: ^aAmerican Institute of Physics
240: ^aSemiconductor science and technology
245: ^aSemiconductor science and technology
260: ^a(LondonEngland ^b Institute of Physics ^c2001
300: ^bv: 30 cm
500: ^aTitle from cover Chemical abstracts Issued also in microfiche and online. Online version in HTML format via the World Wide Web available to institutions with a print subscription and/or a site license; some files in Acrobat and PostScript formats
700: ^a Institute of Physics (Great Britain)