00483nam 2214529 450000100060000000300230000600500090002900800410003802000140007910000540009326000860014730000130023324501050024614529StarLibrary Marc Built20180420201711 ||||| |||||||||||amh  a0894-6507 aInstitute of Electrical and Electronics Engineers bNew York(UNITED STATES): Institute of Electrical and Electronics Engineers c2002 a133-292p aIEEE Transactions on Semicondutor Manufacturing / Institute of Electrical and Electronics Engineers,